Delta Laser Micromachining System

The Delta Laser Micromachining System is designed for laser processing of materials including laser micromachining, precision laser ablation and selective ablation, drilling, surface texturing, and marking.  With a range of sizes and form factors available, this standard platform can readily accommodate a large variety of sample part sizes, motion stage travel dimensions, laser sources, optical delivery methods, and automation and accessory components.  Tooling can be customized to suit your application.

Delta Laser Micromachining Systems are most commonly integrated with galvanometer scan heads and femtosecond lasers, which provide the best material removal quality, with minimal-to-no thermal defects, and the highest degree of process stability and precision.  With options in IR, green, and in special cases, UV, wavelengths, femtosecond lasers provide the optimal processing ...

Technical Specifications

Laser and Motion ParametersSpecifications
LaserFemtosecond laser; IR, green, or UV wavelengths
Picosecond laser; IR, green, or UV wavelengths
Fiber laser; IR wavelength
DPSS Nanosecond laser; Green or UV wavelengths
CO2 laser; IR wavelength
Focused Spot Size< 10 µm achievable
ToolingCollets: 5C Levin D, ER16, ER25, ER40
3-Jaw Chuck
Custom tooling designs
Beam DeliveryGalvanometer 2D scan head
Fixed-optic focus head
Multi-axis 3D scan head
Linear AxesAccuracy/Repeatability: Up to +/- 0.4 µm | +/- 0.1 µm
Rotary AxesAccuracy/Repeatability: Up to +/- 1 arcsec | +/- 0.5 arcsec
Linear Z-AxesAccuracy/Repeatability: Up to +/- 1 µm | +/- 1 µm
*NoteInput power, dimensions and weight dependent on final system configuration.